MEASUREMENT OF HEIGHT OF MELT LEVEL IN CZ METHOD

PURPOSE:To accurately measure height of melt level without being influenced by waving of melt level by adding compensation based on distance between peaks to a peak position in the vertical direction at the central part of the peaks to obtain height of melt level. CONSTITUTION:Single crystal 4 of si...

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Bibliographische Detailangaben
1. Verfasser: ISHIMOTO HAYAHARU
Format: Patent
Sprache:eng
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