POLISHING AGENT FOR GALLIUM ARSENIDE

PURPOSE:To make it possible to obtain a high polishing speed, a small surface roughness and a small waviness by a method wherein the amount of sodium tripolyphosphate is contained in a polishing agent by 3.3-6.6 times in weight to an available chlorine. CONSTITUTION:In a polishing agent for gallium...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MIYAZAKI KUNIHIRO, TAKIYAMA MASAHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	ADHESIVES BASIC ELECTRIC ELEMENTS CHEMISTRY DYES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS NATURAL RESINS PAINTS POLISHES SEMICONDUCTOR DEVICES
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