SEMICONDUCTOR GAS SENSOR

PURPOSE:To raise the heating effect and to improve the sensitivity and the gas responsiveness by laminating successively a metallic layer having an electric heating function, an insulating layer and a gas sensitive layer and providing a leader line, an electrode and a lead wire on an insulating subs...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SASAI RUMI, YOSHIDA TAKASHI
Format: Patent
Sprache:eng
Schlagworte:
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