ETCHING DEVICE

PURPOSE:To accurately and uniformly etch bodies to be treated by fitting plural power supply points on a carrier holding the bodies and by impressing branched electric power from an external power source to generate plasma between the carrier and counter electrodes. CONSTITUTION:A carrier 1 holding...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NAGAIKE SADAKUNI, SAWASE FUMIHIKO, OTA SAKAE, HASHIWAKI HIRONAO, HONDA YOSHINORI
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25 NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE
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