SEMICONDUCTOR MANUFACTURING APPARATUS

PURPOSE:To prevent any reaction product from adhering to a peep window by sticking a hot wire to the quartz glass peep window provided on the wall surface of a reaction chamber and heating the peep window. CONSTITUTION:A heating hot wire 109 is allowed to stick to a quartz glass peep window 108 prov...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	KATAMI KAZUHIKO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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