CAGE-SHAPED BOAT
PURPOSE:To make the thickness of a film uniform even when used for LTO by restricting the flow of process gas to an element to be treated, to cope with the automation of transferring the element, and to be adapted for use in a vertical furnace by disposing a plurality of substantially circular parti...
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| creator | YAGI YASUSHI IBARAKI KOICHI |
| description | PURPOSE:To make the thickness of a film uniform even when used for LTO by restricting the flow of process gas to an element to be treated, to cope with the automation of transferring the element, and to be adapted for use in a vertical furnace by disposing a plurality of substantially circular partition members at each predetermined patch. CONSTITUTION:A boat 10 having a plurality of substantially disclike elements 18 disposed to be supported is supported by disposing a plurality of substantially circular partition members 20 formed along approximately whole periphery of the elements 18 at each predetermined pitch, and inserting the elements 18 between the members 20 to support them, and process gas is introduced on the elements 18 from slits 25 between the members 20. For example, the cage-shaped board 10 has partition members 20, side plates 12, 14, four supporting plates 16, and the like. The member 20 has a circular gas restricting ring 22 formed along approximately whole periphery of a wafer 18 and an inner ring 23 abutted against approx. 180 deg. of the outer edge of the wafer 18 for forming a step for supporting the wafer 18. |
| format | Patent |
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CONSTITUTION:A boat 10 having a plurality of substantially disclike elements 18 disposed to be supported is supported by disposing a plurality of substantially circular partition members 20 formed along approximately whole periphery of the elements 18 at each predetermined pitch, and inserting the elements 18 between the members 20 to support them, and process gas is introduced on the elements 18 from slits 25 between the members 20. For example, the cage-shaped board 10 has partition members 20, side plates 12, 14, four supporting plates 16, and the like. The member 20 has a circular gas restricting ring 22 formed along approximately whole periphery of a wafer 18 and an inner ring 23 abutted against approx. 180 deg. of the outer edge of the wafer 18 for forming a step for supporting the wafer 18.</description><language>eng</language><subject>ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR ; BASIC ELECTRIC ELEMENTS ; CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS ; CONVEYING ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; HANDLING THIN OR FILAMENTARY MATERIAL ; PACKAGES ; PACKAGING ELEMENTS ; PACKING ; PERFORMING OPERATIONS ; SEMICONDUCTOR DEVICES ; STORING ; TRANSPORTING</subject><creationdate>1989</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19890925&DB=EPODOC&CC=JP&NR=H01239853A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,777,882,25545,76296</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19890925&DB=EPODOC&CC=JP&NR=H01239853A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>YAGI YASUSHI</creatorcontrib><creatorcontrib>IBARAKI KOICHI</creatorcontrib><title>CAGE-SHAPED BOAT</title><description>PURPOSE:To make the thickness of a film uniform even when used for LTO by restricting the flow of process gas to an element to be treated, to cope with the automation of transferring the element, and to be adapted for use in a vertical furnace by disposing a plurality of substantially circular partition members at each predetermined patch. CONSTITUTION:A boat 10 having a plurality of substantially disclike elements 18 disposed to be supported is supported by disposing a plurality of substantially circular partition members 20 formed along approximately whole periphery of the elements 18 at each predetermined pitch, and inserting the elements 18 between the members 20 to support them, and process gas is introduced on the elements 18 from slits 25 between the members 20. For example, the cage-shaped board 10 has partition members 20, side plates 12, 14, four supporting plates 16, and the like. The member 20 has a circular gas restricting ring 22 formed along approximately whole periphery of a wafer 18 and an inner ring 23 abutted against approx. 180 deg. of the outer edge of the wafer 18 for forming a step for supporting the wafer 18.</description><subject>ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR</subject><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS</subject><subject>CONVEYING</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>HANDLING THIN OR FILAMENTARY MATERIAL</subject><subject>PACKAGES</subject><subject>PACKAGING ELEMENTS</subject><subject>PACKING</subject><subject>PERFORMING OPERATIONS</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>STORING</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>1989</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZBBwdnR31Q32cAxwdVFw8ncM4WFgTUvMKU7lhdLcDIpuriHOHrqpBfnxqcUFicmpeakl8V4BHgaGRsaWFqbGjsbEqAEA69Udbw</recordid><startdate>19890925</startdate><enddate>19890925</enddate><creator>YAGI YASUSHI</creator><creator>IBARAKI KOICHI</creator><scope>EVB</scope></search><sort><creationdate>19890925</creationdate><title>CAGE-SHAPED BOAT</title><author>YAGI YASUSHI ; IBARAKI KOICHI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JPH01239853A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>1989</creationdate><topic>ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR</topic><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS</topic><topic>CONVEYING</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>HANDLING THIN OR FILAMENTARY MATERIAL</topic><topic>PACKAGES</topic><topic>PACKAGING ELEMENTS</topic><topic>PACKING</topic><topic>PERFORMING OPERATIONS</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>STORING</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>YAGI YASUSHI</creatorcontrib><creatorcontrib>IBARAKI KOICHI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>YAGI YASUSHI</au><au>IBARAKI KOICHI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>CAGE-SHAPED BOAT</title><date>1989-09-25</date><risdate>1989</risdate><abstract>PURPOSE:To make the thickness of a film uniform even when used for LTO by restricting the flow of process gas to an element to be treated, to cope with the automation of transferring the element, and to be adapted for use in a vertical furnace by disposing a plurality of substantially circular partition members at each predetermined patch. CONSTITUTION:A boat 10 having a plurality of substantially disclike elements 18 disposed to be supported is supported by disposing a plurality of substantially circular partition members 20 formed along approximately whole periphery of the elements 18 at each predetermined pitch, and inserting the elements 18 between the members 20 to support them, and process gas is introduced on the elements 18 from slits 25 between the members 20. For example, the cage-shaped board 10 has partition members 20, side plates 12, 14, four supporting plates 16, and the like. The member 20 has a circular gas restricting ring 22 formed along approximately whole periphery of a wafer 18 and an inner ring 23 abutted against approx. 180 deg. of the outer edge of the wafer 18 for forming a step for supporting the wafer 18.</abstract><oa>free_for_read</oa></addata></record> |
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| language | eng |
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| subjects | ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR BASIC ELECTRIC ELEMENTS CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKAGES PACKAGING ELEMENTS PACKING PERFORMING OPERATIONS SEMICONDUCTOR DEVICES STORING TRANSPORTING |
| title | CAGE-SHAPED BOAT |
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