PLASMA TREATMENT APPARATUS

PURPOSE:To clean and remove a substance adhered to a wall face in a whole region inside a treatment chamber including a gap part sandwiched between an earth shielding body and an inner wall of the treatment chamber by a method wherein a plasma is generated in the gap part. CONSTITUTION:A changeover...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TOKUDA MITSUO, NAKAJIYOU KAZUTSUNA, KATO SEIICHI, KAMIMURA TAKASHI, OTSUBO TORU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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