GROWTH OF COMPOUND SEMICONDUCTOR SINGLE CRYSTAL

PURPOSE:To accomplish growth of the above single crystal in high quality and yield using the LEC process, by facing the upper end of the outer circumference of a graphite crucible and the inner circumference of a thermal insulating plate each other and carrying out pulling of single crystal. CONSTIT...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MASUKATA YOSHIMASA, TAKAHASHI MICHIO, TAMAI FUJIO, KITAMURA KAZUNARI
Format: Patent
Sprache:eng
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