JP2952641B

PURPOSE: To obtain equipment and a method for testing an integrated circuit device which enable easy and reliable detection of a state of contact of a probe with a pad of the device to be tested. CONSTITUTION: The equipment comprises a first dummy pad part 1 comprising conductive electrodes 1a to 1c...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	ICHIKAWA MASAHIKO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
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