JP2777139B

PURPOSE:To surely maintain the soundness of a cooling base plate which has internally coolant flow passages by metallurgically joining the cooling base plate and a protective plate to the plasma side face of said base plate and further, joining a heat receiving plate to the plasma side of the protec...

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Bibliographische Detailangaben
Hauptverfasser: OOMORI JUNJI, KOBAYASHI TAKESHI, ISHAMA SHINTARO, YAMADA MASAO
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PURPOSE:To surely maintain the soundness of a cooling base plate which has internally coolant flow passages by metallurgically joining the cooling base plate and a protective plate to the plasma side face of said base plate and further, joining a heat receiving plate to the plasma side of the protective plate. CONSTITUTION:The flow passages 102 for passing the coolant are formed to the cooling base plate 101 and the protective plate 103 is metallurgically joined to the base plate 101. The heat receiving plate 104 is fixed by an internal thread part 105 to the plate 103 and the thread part 105 is formed thinner than the other parts. The heat receiving plate 104 is bolted 106 to the plate 103. The heat receiving plate 104 in the part where the bolts 106 are screwed down is formed thin as well. Further, the top end face of the bolts 106 is recessed from the plane of the plate 104 in the screwed state of the bolts 106 to decrease the thermal load from plasma at the time of abnormal annihilation of the plasma on the bolts 106. An austenitic stainless steel is used for the material of the base plate 101, graphite for the protective plate 103 and a composite for the heat receiving plate 104 and the bolts 106. The weaving direction of the fibers of the composite is paralleled with the surface of the heat receiving plate 104 to prevent cracking.