JP2645384B

A positive type photosensitive resinous composition comprising a base resin, having at least one side chain or at an end portion of its main chain, an iminosulfonate group of the formula: in which R1 and R2 are the same or are different and each represents a hydrogen atom or an alkyl, acyl, phenyl,...

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Hauptverfasser: SHIRAI MASAMITSU, NISHIJIMA KANJI, KADOOKA MASAHIRO, ISHIKAWA KATSUKYO
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creator SHIRAI MASAMITSU
NISHIJIMA KANJI
KADOOKA MASAHIRO
ISHIKAWA KATSUKYO
description A positive type photosensitive resinous composition comprising a base resin, having at least one side chain or at an end portion of its main chain, an iminosulfonate group of the formula: in which R1 and R2 are the same or are different and each represents a hydrogen atom or an alkyl, acyl, phenyl, naphthyl, anthryl or benzyl group, or R1 and R2, together with the adjacent carbon atom, form an alicyclic ring, and a group containing an acid-decomposable bond, the content of said iminosulfonate groups being 1x10 to 3x10 equivalent/g; the composition also containing groups containing an acid-decomposable bond.
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subjects APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
title JP2645384B
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