LASER PRODUCED PLASMA LIGHT SOURCE HAVING TARGET MATERIAL COVERING CYLINDRICALLY SYMMETRIC ELEMENT

To reduce leakage of bearing gas.SOLUTION: The present disclosure is directed to laser produced plasma light sources having a target material, such as Xenon, that covers an outer surface of a drum. Embodiments include bearing systems for rotating the drum that have structures for reducing leakage of...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OLEG KHODYKIN, RUDY GARCIA, FRANK CHILESE, BRIAN AHR, ALEXEY KURITSYN
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS X-RAY TECHNIQUE
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