FOREIGN SUBSTANCE REMOVAL METHOD, FOREIGN SUBSTANCE REMOVAL DEVICE, FORMING METHOD, AND ARTICLE MANUFACTURING METHOD

To provide a foreign substance removal technique advantageous for reducing a composition residue.SOLUTION: A foreign substance removal method for removing a foreign substance on a first member includes the steps of: acquiring information on the surface area of the first member; selecting a second member based on the acquired information; supplying a composition onto the first member; bringing the selected second member and the composition on the first member into contact with each other so that the foreign substance on the first member is taken into the composition on the first member; curing the composition while maintaining a state where the composition is attached to the second member; and separating the second member from the first member to peel off the composition from the first member. In the selection step, the second member is selected whose contact area with the composition is larger than the contact area of the first member with the composition.SELECTED DRAWING: Figure 1 【課題】組成物残渣の低減に有利な異物除去の技術を提供する。【解決手段】第１部材の上の異物を除去する異物除去方法は、第１部材の表面積に関する情報を取得し、取得した情報に基づいて第２部材を選択し、第１部材の上に組成物を供給し、第１部材の上の組成物に第１部材の上の異物が取り込まれるように、選択された第２部材と第１部材の上の組成物とを接触させ、組成物が第２部材に付着した状態を維持しながら組成物を硬化させ、第１部材から第２部材を分離させることにより、第１部材から組成物を剥離する工程を有する。選択する工程では、組成物との接触面積が第１部材と組成物との接触面積より大きい第２部材が選択される。【選択図】 図１