TREATMENT LIQUID SUPPLY SYSTEM AND OPERATIONAL METHOD OF THE SAME

To achieve high cleanliness and discharge accuracy with the smaller number of components even when using a chemical solution with high viscosity.SOLUTION: A treatment liquid supply system according to an embodiment of the present disclosure, comprises: a tank that accumulates treatment liquid suppli...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MORI SADAMICHI, KASAHARA MASATOSHI, IWANAGA NAOHIRO, UCHINO KEIICHIRO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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