TEMPERATURE CONTROL FOR INSERTABLE TARGET HOLDER FOR SOLID DOPANT MATERIAL

To disclose an ion source with a target holder for holding a solid dopant material.SOLUTION: An ion source comprises a thermocouple disposed proximate to a target holder to monitor the temperature of a solid dopant material. In certain embodiments, a controller uses the temperature information to va...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CRAIG R CHANEY, SHREYANSH P PATEL, DANIEL R TIEGER, DANIEL ALVARADO, GRAHAM WRIGHT, BENJAMIN OSWALD, BRIAN S GORI, WILLIAM R BOGIAGES JR
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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