SUBSTRATE PROCESSING DEVICE AND BUBBLE REMOVING METHOD FOR FILTER

To provide a substrate processing device capable of suppressing a filter exchange frequency of a filter, and a bubble removing method for a filter.SOLUTION: A substrate processing device 100 includes a substrate processing unit 10, a pipe 32, a filter 141, an upstream side pipe 151, a downstream sid...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NAGAO TAKASHI, ISHIKAWA HIDEKAZU, FUJII SADAMU, TENG POH LING, DOBASHI YUYA
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!