SEMICONDUCTOR DETECTOR AND METHOD OF FABRICATING THE SAME

To improve the performance of a semiconductor detector.SOLUTION: The present disclosure describes a detector used in critical dimension scanning electron microscopes (CD-SEM) and review SEM systems. In one embodiment, the detector includes a semiconductor structure having a p-n junction and a hole t...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GIANPAOLO LORITO, NIHTIANOV STOYAN, KANAI KENICHI, LIANG XINQING
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!