DEBRIS REDUCTION DEVICE AND LIGHT SOURCE DEVICE THEREWITH

To provide a debris reduction device which can be improved in probability of capturing of debris, and a light source device therewith.SOLUTION: A debris reduction device according to one embodiment of the present technique includes a fixed foil trap. The fixed foil trap has a casing portion, a plurality of foils, an inflow port, and a pressure increase mechanism. The casing portion has an incident port into which light emitted from a light source enters, an ejection port through which light entered from the entrance progresses, and an internal space through which the light progresses. A plurality of foils are fixed to a region of the interior space through which the light progresses. The inflow port is configured to communicate with the internal space of the casing portion, and a transparent gas that is transparent to light flows into the inflow port. A pressure increase mechanism includes at least one of: an incidence-side member placed at the incident port in such a manner that an opening area of the incident port is reduced without blocking the progress of the light; and an ejection side member that is arranged at the entrance port in such a manner that the opening area of the ejection port is reduced without blocking the progress of the light, and consequently the pressure increase mechanism increases the pressure of the internal space.SELECTED DRAWING: Figure 2 【課題】デブリの捕捉確率を向上させることを可能とするデブリ低減装置、及びこれを備えた光源装置を提供すること。【解決手段】本技術の一形態に係るデブリ低減装置は、固定式ホイルトラップを具備する。固定式ホイルトラップは、筐体部と、複数のホイルと、流入孔と、圧力増加機構とを有する。筐体部は、光源から出射された光が入射する入射口と、入射口から入射した光が出射される出射口と、光が進行する内部空間とを有する。複数のホイルは、内部空間の光が進行する領域に固定される。流入孔は、筐体部に内部空間に連通するように構成され、光に対して透明な透明ガスが流入される。圧力増加機構は、光の進行を遮ることなく入射口の開口面積が小さくなるように入射口に配置される入射側部材、又は光の進行を遮ることなく出射口の開口面積が小さくなるように出射口に配置される出射側部材の少なくとも一方を含み、内部空間の圧力を増加させる。【選択図】図２