CHARGED PARTICLE BEAM DEVICE AND IMAGE ACQUISITION METHOD

To provide a charged particle beam device capable of reducing blurs of an image caused by positional displacement between frame images.SOLUTION: A charged particle beam device includes: an optical system in which a probe is formed from charged particle beams and a specimen is scanned by the probe; a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TSUTSUMI KENICHI, IKEO NOBUYUKI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
Online-Zugang:	Volltext bestellen
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