INSPECTION DEVICE AND INSPECTION METHOD

To provide a technique capable of promoting miniaturization of a device while stably securing power at inspection of an inspection object.SOLUTION: An inspection device electrically inspects an inspection object. The inspection device comprises: a power supply module that supplies power to be used f...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SUGIYAMA KATSUMASA, MORIYA HIDESUMI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTINGELECTRIC POWER CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION SEMICONDUCTOR DEVICES SYSTEMS FOR STORING ELECTRIC ENERGY
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