SURFACE INSPECTION DEVICE, SURFACE INSPECTION METHOD AND PROGRAM

To provide a surface inspection device, a surface inspection method and a program that can speedily detect foreign matter and a flaw on a surface of a cylindrical object.SOLUTION: A surface inspection device 1 comprises: a camera 21 which is arranged facing a surface of a cylindrical object, and images the surface of the cylindrical object; a rod-like member 23 which is arranged extending along an axis of the cylindrical object, and supports the camera 21; a head mechanism 24 which supports the rod-like member 23, and translates the camera 21 along the axis of the cylindrical object and also rotates the camera 21 on a center axis of the cylindrical object; and a control unit which is connected to the camera 21 and head mechanism 24, and controls operations of the camera 21 and head mechanism 24.SELECTED DRAWING: Figure 1 【課題】筒状対象物の表面における異物や傷を迅速に検知可能な表面検査装置、表面検査方法及びプログラムを提供する。【解決手段】表面検査装置１は、筒状対象物の表面に向かって配置され、筒状対象物の表面を撮像するカメラ２１と、筒状対象物の軸方向に延びるように配置され、カメラ２１を支持する棒状部材２３と、棒状部材２３を支持し、カメラ２１を筒状対象物の軸方向に並進移動させると共にカメラ２１を筒状対象物の中心軸の周りに回転させるヘッド機構２４と、カメラ２１及びヘッド機構２４に接続され、カメラ２１及びヘッド機構２４の動作を制御する制御ユニットと、備える。【選択図】図１