HIGH-FREQUENCY POWER SUPPLY DEVICE
To generate a modulation signal of a period similar to that of a high frequency voltage output from a second power supply in a first power supply.SOLUTION: A high-frequency power supply device includes: a first power supply that supplies a first high-frequency power having a first base frequency to...
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| creator | MORII TATSUYA UENO TAKEYA HASEGAWA YUICHI |
| description | To generate a modulation signal of a period similar to that of a high frequency voltage output from a second power supply in a first power supply.SOLUTION: A high-frequency power supply device includes: a first power supply that supplies a first high-frequency power having a first base frequency to a load; a second power supply that supplies a second high-frequency power having a second base frequency lower than the first base frequency to the load; a first matching part; and a second matching part connected between the second power supply and the load. The second matching part generates a timing control signal of which the frequency is lower than the second base frequency on the basis of detection information of the second high frequency voltage, and supplies the timing control signal to the first power supply. The first power supply sets a start phase of a modulation signal in accordance with the timing control signal when a frequency modulation control that the frequency is modulated by the modulation signal having the first high frequency voltage at the frequency similar to the second base frequency, and outputs the frequency as a modulation wave is performed, and the modulation signal is generated in accordance with the start phase of the modulation signal, and the frequency modulation control of the first high frequency voltage is performed by using the modulation signal.SELECTED DRAWING: Figure 1
【課題】第１の電源において、第２の電源から出力される高周波電圧の周期と同じ周期の変調信号を生成する。【解決手段】高周波電源装置は、第１の基本周波数を有する第１の高周波電力を負荷に供給する第１の電源と、第１の基本周波数より低い第２の基本周波数を有する第２の高周波電力を負荷に供給する第２の電源と、第１の整合部と、第２の電源と負荷との間に接続された第２の整合部と、を有する。第２の整合部は、第２の高周波電圧の検出情報に基づいて第２の基本周波数より周波数が低いタイミング制御信号を生成して第１の電源へ供給し、第１の電源は、第１の高周波電圧を第２の基本周波数と同じ周波数を有する変調信号で周波数変調させ変調波として出力する周波数変調制御を行う際に、タイミング制御信号に応じて変調信号の開始位相を設定し、変調信号の開始位相に応じて変調信号を生成し、変調信号を用いて第１の高周波電圧を周波数変調制御する。【選択図】図１ |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_JP2023098298A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>JP2023098298A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_JP2023098298A3</originalsourceid><addsrcrecordid>eNrjZFDy8HT30HULcg0MdfVzjlQI8A93DVIIDg0I8IlUcHEN83R25WFgTUvMKU7lhdLcDEpuriHOHrqpBfnxqcUFicmpeakl8V4BRgZGxgaWFkaWFo7GRCkCAIy0Ixw</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>HIGH-FREQUENCY POWER SUPPLY DEVICE</title><source>esp@cenet</source><creator>MORII TATSUYA ; UENO TAKEYA ; HASEGAWA YUICHI</creator><creatorcontrib>MORII TATSUYA ; UENO TAKEYA ; HASEGAWA YUICHI</creatorcontrib><description>To generate a modulation signal of a period similar to that of a high frequency voltage output from a second power supply in a first power supply.SOLUTION: A high-frequency power supply device includes: a first power supply that supplies a first high-frequency power having a first base frequency to a load; a second power supply that supplies a second high-frequency power having a second base frequency lower than the first base frequency to the load; a first matching part; and a second matching part connected between the second power supply and the load. The second matching part generates a timing control signal of which the frequency is lower than the second base frequency on the basis of detection information of the second high frequency voltage, and supplies the timing control signal to the first power supply. The first power supply sets a start phase of a modulation signal in accordance with the timing control signal when a frequency modulation control that the frequency is modulated by the modulation signal having the first high frequency voltage at the frequency similar to the second base frequency, and outputs the frequency as a modulation wave is performed, and the modulation signal is generated in accordance with the start phase of the modulation signal, and the frequency modulation control of the first high frequency voltage is performed by using the modulation signal.SELECTED DRAWING: Figure 1
【課題】第１の電源において、第２の電源から出力される高周波電圧の周期と同じ周期の変調信号を生成する。【解決手段】高周波電源装置は、第１の基本周波数を有する第１の高周波電力を負荷に供給する第１の電源と、第１の基本周波数より低い第２の基本周波数を有する第２の高周波電力を負荷に供給する第２の電源と、第１の整合部と、第２の電源と負荷との間に接続された第２の整合部と、を有する。第２の整合部は、第２の高周波電圧の検出情報に基づいて第２の基本周波数より周波数が低いタイミング制御信号を生成して第１の電源へ供給し、第１の電源は、第１の高周波電圧を第２の基本周波数と同じ周波数を有する変調信号で周波数変調させ変調波として出力する周波数変調制御を行う際に、タイミング制御信号に応じて変調信号の開始位相を設定し、変調信号の開始位相に応じて変調信号を生成し、変調信号を用いて第１の高周波電圧を周波数変調制御する。【選択図】図１</description><language>eng ; jpn</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; PLASMA TECHNIQUE ; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS ; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS ; SEMICONDUCTOR DEVICES</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230710&DB=EPODOC&CC=JP&NR=2023098298A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25562,76317</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230710&DB=EPODOC&CC=JP&NR=2023098298A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>MORII TATSUYA</creatorcontrib><creatorcontrib>UENO TAKEYA</creatorcontrib><creatorcontrib>HASEGAWA YUICHI</creatorcontrib><title>HIGH-FREQUENCY POWER SUPPLY DEVICE</title><description>To generate a modulation signal of a period similar to that of a high frequency voltage output from a second power supply in a first power supply.SOLUTION: A high-frequency power supply device includes: a first power supply that supplies a first high-frequency power having a first base frequency to a load; a second power supply that supplies a second high-frequency power having a second base frequency lower than the first base frequency to the load; a first matching part; and a second matching part connected between the second power supply and the load. The second matching part generates a timing control signal of which the frequency is lower than the second base frequency on the basis of detection information of the second high frequency voltage, and supplies the timing control signal to the first power supply. The first power supply sets a start phase of a modulation signal in accordance with the timing control signal when a frequency modulation control that the frequency is modulated by the modulation signal having the first high frequency voltage at the frequency similar to the second base frequency, and outputs the frequency as a modulation wave is performed, and the modulation signal is generated in accordance with the start phase of the modulation signal, and the frequency modulation control of the first high frequency voltage is performed by using the modulation signal.SELECTED DRAWING: Figure 1
【課題】第１の電源において、第２の電源から出力される高周波電圧の周期と同じ周期の変調信号を生成する。【解決手段】高周波電源装置は、第１の基本周波数を有する第１の高周波電力を負荷に供給する第１の電源と、第１の基本周波数より低い第２の基本周波数を有する第２の高周波電力を負荷に供給する第２の電源と、第１の整合部と、第２の電源と負荷との間に接続された第２の整合部と、を有する。第２の整合部は、第２の高周波電圧の検出情報に基づいて第２の基本周波数より周波数が低いタイミング制御信号を生成して第１の電源へ供給し、第１の電源は、第１の高周波電圧を第２の基本周波数と同じ周波数を有する変調信号で周波数変調させ変調波として出力する周波数変調制御を行う際に、タイミング制御信号に応じて変調信号の開始位相を設定し、変調信号の開始位相に応じて変調信号を生成し、変調信号を用いて第１の高周波電圧を周波数変調制御する。【選択図】図１</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>PLASMA TECHNIQUE</subject><subject>PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS</subject><subject>PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZFDy8HT30HULcg0MdfVzjlQI8A93DVIIDg0I8IlUcHEN83R25WFgTUvMKU7lhdLcDEpuriHOHrqpBfnxqcUFicmpeakl8V4BRgZGxgaWFkaWFo7GRCkCAIy0Ixw</recordid><startdate>20230710</startdate><enddate>20230710</enddate><creator>MORII TATSUYA</creator><creator>UENO TAKEYA</creator><creator>HASEGAWA YUICHI</creator><scope>EVB</scope></search><sort><creationdate>20230710</creationdate><title>HIGH-FREQUENCY POWER SUPPLY DEVICE</title><author>MORII TATSUYA ; UENO TAKEYA ; HASEGAWA YUICHI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2023098298A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; jpn</language><creationdate>2023</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>PLASMA TECHNIQUE</topic><topic>PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS</topic><topic>PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>MORII TATSUYA</creatorcontrib><creatorcontrib>UENO TAKEYA</creatorcontrib><creatorcontrib>HASEGAWA YUICHI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>MORII TATSUYA</au><au>UENO TAKEYA</au><au>HASEGAWA YUICHI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>HIGH-FREQUENCY POWER SUPPLY DEVICE</title><date>2023-07-10</date><risdate>2023</risdate><abstract>To generate a modulation signal of a period similar to that of a high frequency voltage output from a second power supply in a first power supply.SOLUTION: A high-frequency power supply device includes: a first power supply that supplies a first high-frequency power having a first base frequency to a load; a second power supply that supplies a second high-frequency power having a second base frequency lower than the first base frequency to the load; a first matching part; and a second matching part connected between the second power supply and the load. The second matching part generates a timing control signal of which the frequency is lower than the second base frequency on the basis of detection information of the second high frequency voltage, and supplies the timing control signal to the first power supply. The first power supply sets a start phase of a modulation signal in accordance with the timing control signal when a frequency modulation control that the frequency is modulated by the modulation signal having the first high frequency voltage at the frequency similar to the second base frequency, and outputs the frequency as a modulation wave is performed, and the modulation signal is generated in accordance with the start phase of the modulation signal, and the frequency modulation control of the first high frequency voltage is performed by using the modulation signal.SELECTED DRAWING: Figure 1
【課題】第１の電源において、第２の電源から出力される高周波電圧の周期と同じ周期の変調信号を生成する。【解決手段】高周波電源装置は、第１の基本周波数を有する第１の高周波電力を負荷に供給する第１の電源と、第１の基本周波数より低い第２の基本周波数を有する第２の高周波電力を負荷に供給する第２の電源と、第１の整合部と、第２の電源と負荷との間に接続された第２の整合部と、を有する。第２の整合部は、第２の高周波電圧の検出情報に基づいて第２の基本周波数より周波数が低いタイミング制御信号を生成して第１の電源へ供給し、第１の電源は、第１の高周波電圧を第２の基本周波数と同じ周波数を有する変調信号で周波数変調させ変調波として出力する周波数変調制御を行う際に、タイミング制御信号に応じて変調信号の開始位相を設定し、変調信号の開始位相に応じて変調信号を生成し、変調信号を用いて第１の高周波電圧を周波数変調制御する。【選択図】図１</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS SEMICONDUCTOR DEVICES |
| title | HIGH-FREQUENCY POWER SUPPLY DEVICE |
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