RESIST COMPOSITION, CURED PRODUCT, MATRIX PATTERN, AND COLORED DISPERSION LIQUID INCLUDING THE SAME, AND METHOD FOR PRODUCING RESIST COMPOSITION

To provide a resist composition that is suitable for forming a cured product (cured film) having excellent curability and patternability even when subjected to low temperature curing.SOLUTION: A photosensitive resin composition contains (A) a partly methacrylated epoxy resin with part of epoxy resin...

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Hauptverfasser: IWAI KOHEI, ONO YUKI
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ONO YUKI
description To provide a resist composition that is suitable for forming a cured product (cured film) having excellent curability and patternability even when subjected to low temperature curing.SOLUTION: A photosensitive resin composition contains (A) a partly methacrylated epoxy resin with part of epoxy resin being methacrylated, (B) a solvent, (C) a polymerizable unsaturated group-containing alkali-soluble resin, and (D) a photopolymerization initiator.SELECTED DRAWING: None 【課題】低温硬化を行った場合においても、硬化性とパターニング性に優れた硬化物(硬化膜)を形成するような用途に好適なレジスト組成物を提供する。【解決手段】(A)エポキシ樹脂の一部が(メタ)アクリル化された部分(メタ)アクリル化エポキシ樹脂、(B)溶剤、(C)重合性不飽和基含有アルカリ可溶性樹脂及び(D)光重合開始剤を含有することを特徴とするレジスト組成物である。【選択図】なし
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language eng ; jpn
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subjects APPARATUS SPECIALLY ADAPTED THEREFOR
CHEMISTRY
CINEMATOGRAPHY
COMPOSITIONS BASED THEREON
ELECTROGRAPHY
HOLOGRAPHY
MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS
MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONSONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
MATERIALS THEREFOR
METALLURGY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
ORGANIC MACROMOLECULAR COMPOUNDS
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
THEIR PREPARATION OR CHEMICAL WORKING-UP
title RESIST COMPOSITION, CURED PRODUCT, MATRIX PATTERN, AND COLORED DISPERSION LIQUID INCLUDING THE SAME, AND METHOD FOR PRODUCING RESIST COMPOSITION
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