PLASMA PROCESSING DEVICE

To efficiently activate gas by plasma in the vicinity of a supply port of electromagnetic waves.SOLUTION: A plasma processing device has a processing container, a top wall forming part of the processing container and having an aperture, and a transmission window closing the aperture. The aperture be...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MIYASHITA HIROYUKI, GUNJI ISAO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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