OPTICAL INTERFERENCE FILTER
To improve the performance, manufacturability and/or reliability of an optical filter by reducing the complexity associated with forming a set of layers.SOLUTION: An optical interference filter includes a substrate, and a set of layers disposed on the substrate. The set of layers includes a first su...
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| creator | GRIGONIS MARIUS YANG JINHUI HENDRIX KAREN DENISE ANDY SHKABKO GEORG J OCKENFUSS |
| description | To improve the performance, manufacturability and/or reliability of an optical filter by reducing the complexity associated with forming a set of layers.SOLUTION: An optical interference filter includes a substrate, and a set of layers disposed on the substrate. The set of layers includes a first subset of layers, and a second subset of layers. Each layer of the first subset comprises an aluminum nitride (AlN) material. A stress of each layer of the first subset is between -1000 and 800 megapascals. The first subset of layers has a first refractive index with a first value. Each layer of the second subset comprises at least one other material. The second subset of layers has a second refractive index with a second value that is different than the first value. The optical interference filter has an effective refractive index greater than or equal to 95% of the highest value of the first and second values.SELECTED DRAWING: Figure 2
【課題】層のセットの形成に伴う複雑さを低減することにより、光学フィルタの性能、製造性、及び／又は信頼性が向上する。【解決手段】光学干渉フィルタが、基板と、基板上に配置された層のセットと、を備え、層のセットは、層の第１のサブセット、及び層の第２のサブセットを有し、各層の第１のサブセットは窒化アルミニウム(ＡｌＮ)材料を含み、各層の第1のサブセットの応力が、－１０００～８００メガパスカルであり、層の第１のサブセットは、第１の値を有する第１の屈折率を有し、各層の第２のサブセットは少なくとも１つの他の材料を含み、層の第２のサブセットは、第１の値とは異なる第２の値を有する第２の屈折率を有し、光学干渉フィルタは、第１の値及び第２の値のうち最高値の９５％以上の有効屈折率を有する。【選択図】図２ |
| format | Patent |
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【課題】層のセットの形成に伴う複雑さを低減することにより、光学フィルタの性能、製造性、及び／又は信頼性が向上する。【解決手段】光学干渉フィルタが、基板と、基板上に配置された層のセットと、を備え、層のセットは、層の第１のサブセット、及び層の第２のサブセットを有し、各層の第１のサブセットは窒化アルミニウム(ＡｌＮ)材料を含み、各層の第1のサブセットの応力が、－１０００～８００メガパスカルであり、層の第１のサブセットは、第１の値を有する第１の屈折率を有し、各層の第２のサブセットは少なくとも１つの他の材料を含み、層の第２のサブセットは、第１の値とは異なる第２の値を有する第２の屈折率を有し、光学干渉フィルタは、第１の値及び第２の値のうち最高値の９５％以上の有効屈折率を有する。【選択図】図２</description><language>eng ; jpn</language><subject>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS ; OPTICS ; PHYSICS</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230613&DB=EPODOC&CC=JP&NR=2023081852A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230613&DB=EPODOC&CC=JP&NR=2023081852A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>GRIGONIS MARIUS</creatorcontrib><creatorcontrib>YANG JINHUI</creatorcontrib><creatorcontrib>HENDRIX KAREN DENISE</creatorcontrib><creatorcontrib>ANDY SHKABKO</creatorcontrib><creatorcontrib>GEORG J OCKENFUSS</creatorcontrib><title>OPTICAL INTERFERENCE FILTER</title><description>To improve the performance, manufacturability and/or reliability of an optical filter by reducing the complexity associated with forming a set of layers.SOLUTION: An optical interference filter includes a substrate, and a set of layers disposed on the substrate. The set of layers includes a first subset of layers, and a second subset of layers. Each layer of the first subset comprises an aluminum nitride (AlN) material. A stress of each layer of the first subset is between -1000 and 800 megapascals. The first subset of layers has a first refractive index with a first value. Each layer of the second subset comprises at least one other material. The second subset of layers has a second refractive index with a second value that is different than the first value. The optical interference filter has an effective refractive index greater than or equal to 95% of the highest value of the first and second values.SELECTED DRAWING: Figure 2
【課題】層のセットの形成に伴う複雑さを低減することにより、光学フィルタの性能、製造性、及び／又は信頼性が向上する。【解決手段】光学干渉フィルタが、基板と、基板上に配置された層のセットと、を備え、層のセットは、層の第１のサブセット、及び層の第２のサブセットを有し、各層の第１のサブセットは窒化アルミニウム(ＡｌＮ)材料を含み、各層の第1のサブセットの応力が、－１０００～８００メガパスカルであり、層の第１のサブセットは、第１の値を有する第１の屈折率を有し、各層の第２のサブセットは少なくとも１つの他の材料を含み、層の第２のサブセットは、第１の値とは異なる第２の値を有する第２の屈折率を有し、光学干渉フィルタは、第１の値及び第２の値のうち最高値の９５％以上の有効屈折率を有する。【選択図】図２</description><subject>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS</subject><subject>OPTICS</subject><subject>PHYSICS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZJD2DwjxdHb0UfD0C3ENcnMNcvVzdlVw8_QB8ngYWNMSc4pTeaE0N4OSm2uIs4duakF-fGpxQWJyal5qSbxXgJGBkbGBhaGFqZGjMVGKAJZ_IQA</recordid><startdate>20230613</startdate><enddate>20230613</enddate><creator>GRIGONIS MARIUS</creator><creator>YANG JINHUI</creator><creator>HENDRIX KAREN DENISE</creator><creator>ANDY SHKABKO</creator><creator>GEORG J OCKENFUSS</creator><scope>EVB</scope></search><sort><creationdate>20230613</creationdate><title>OPTICAL INTERFERENCE FILTER</title><author>GRIGONIS MARIUS ; YANG JINHUI ; HENDRIX KAREN DENISE ; ANDY SHKABKO ; GEORG J OCKENFUSS</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2023081852A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; jpn</language><creationdate>2023</creationdate><topic>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS</topic><topic>OPTICS</topic><topic>PHYSICS</topic><toplevel>online_resources</toplevel><creatorcontrib>GRIGONIS MARIUS</creatorcontrib><creatorcontrib>YANG JINHUI</creatorcontrib><creatorcontrib>HENDRIX KAREN DENISE</creatorcontrib><creatorcontrib>ANDY SHKABKO</creatorcontrib><creatorcontrib>GEORG J OCKENFUSS</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>GRIGONIS MARIUS</au><au>YANG JINHUI</au><au>HENDRIX KAREN DENISE</au><au>ANDY SHKABKO</au><au>GEORG J OCKENFUSS</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>OPTICAL INTERFERENCE FILTER</title><date>2023-06-13</date><risdate>2023</risdate><abstract>To improve the performance, manufacturability and/or reliability of an optical filter by reducing the complexity associated with forming a set of layers.SOLUTION: An optical interference filter includes a substrate, and a set of layers disposed on the substrate. The set of layers includes a first subset of layers, and a second subset of layers. Each layer of the first subset comprises an aluminum nitride (AlN) material. A stress of each layer of the first subset is between -1000 and 800 megapascals. The first subset of layers has a first refractive index with a first value. Each layer of the second subset comprises at least one other material. The second subset of layers has a second refractive index with a second value that is different than the first value. The optical interference filter has an effective refractive index greater than or equal to 95% of the highest value of the first and second values.SELECTED DRAWING: Figure 2
【課題】層のセットの形成に伴う複雑さを低減することにより、光学フィルタの性能、製造性、及び／又は信頼性が向上する。【解決手段】光学干渉フィルタが、基板と、基板上に配置された層のセットと、を備え、層のセットは、層の第１のサブセット、及び層の第２のサブセットを有し、各層の第１のサブセットは窒化アルミニウム(ＡｌＮ)材料を含み、各層の第1のサブセットの応力が、－１０００～８００メガパスカルであり、層の第１のサブセットは、第１の値を有する第１の屈折率を有し、各層の第２のサブセットは少なくとも１つの他の材料を含み、層の第２のサブセットは、第１の値とは異なる第２の値を有する第２の屈折率を有し、光学干渉フィルタは、第１の値及び第２の値のうち最高値の９５％以上の有効屈折率を有する。【選択図】図２</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS |
| title | OPTICAL INTERFERENCE FILTER |
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