EXPANDING DEVICE

To provide an expanding device which can reduce a risk that a holding table may be heated and can also reduce a risk that a sheet may be lifted from the holding table, while reducing a risk that foreign objects generated when heating the sheet may be adhered to a workpiece.SOLUTION: An expanding dev...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MATSUDA TOMOHITO, FUJII YUHEI, TAKESUE NAOYA, MASADA TAKAYUKI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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