LASER CUTTING DEVICE, LASER CUTTING METHOD, AND DISPLAY MANUFACTURING METHOD

To provide a laser cutting device which performs cutting process efficiently, and to provide a manufacturing method of a display.SOLUTION: A laser cutting device 1 according to an embodiment includes: a stage 20 which suctions and holds a workpiece W; an optical system 30 which guides a laser beam f...

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Hauptverfasser: ODAJIMA TAMOTSU, KOBAYASHI NAOYUKI, SHIMOJI TERUAKI, ITO DAISUKE
Format: Patent
Sprache:eng ; jpn
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Zusammenfassung:To provide a laser cutting device which performs cutting process efficiently, and to provide a manufacturing method of a display.SOLUTION: A laser cutting device 1 according to an embodiment includes: a stage 20 which suctions and holds a workpiece W; an optical system 30 which guides a laser beam for cutting the workpiece W to the workpiece W; a guide mechanism which movably holds the optical system 30 in a first direction in a top view; a first drive mechanism which moves the optical system along the guide mechanism; and a second drive mechanism which moves the guide mechanism in a second direction different from the first direction in the top view.SELECTED DRAWING: Figure 1 【課題】効率的に切断プロセスを行うことができるレーザ切断装置、及びディスプレイの製造方法を提供する。【解決手段】本実施形態にかかるレーザ切断装置1は、ワークWを吸着保持するステージ20と、ワークWを切断するためのレーザ光をワークに導く光学系30と、上面視において、第1の方向に光学系30を移動可能に保持するガイド機構と、ガイド機構に沿って前記光学系を移動させる第1駆動機構と、上面視において、ガイド機構を第1の方向と異なる第2の方向に移動させる第2駆動機構と、を備えている。【選択図】図1