METHOD AND DEVICE FOR ANALYZING ION COMPONENT IN ULTRAPURE WATER

To provide a method and a device capable of achieving blank reduction without contamination, and condensing and analyzing ion components in ultrapure water at high sensitivity on time.SOLUTION: There is provided a method for condensing sample ultrapure water and analyzing ion components in pure water by analysis means, which is characterized in that sample ultrapure water is condensed by an electrodialyzer. Preferably, the electrodialyzer is a second electrodialyzer 20. The electrodialyzer passes sample ultrapure water through a first generation chamber 27, passes high-purity nitric acid aqueous solution through a second generation chamber 28, and takes out concentrated analysis water from the second generation chamber 28. The high-purity nitric acid aqueous solution passing through the second generation chamber 28 is generated by subjecting potassium nitrate solution to dialysis treatment by a first electrodialyzer 10.SELECTED DRAWING: Figure 1 【課題】汚染なくブランク低減化を実現し、高感度で且つオンタイムで濃縮、分析することができる超純水中のイオン成分の分析方法及び装置を提供する。【解決手段】試料超純水を濃縮して分析手段で分析する純水中のイオン成分の分析方法において、試料超純水を電気透析装置により濃縮することを特徴とする純水中のイオン成分の分析方法。好ましくは、電気透析装置は第２電気透析装置２０であり、第１生成室２７に試料超純水を通水し、第２生成室２８に高純度硝酸水溶液を通水し、第２生成室２８から分析用濃縮水を取り出す。第２生成室２８に通水する高純度硝酸水溶液は、第１電気透析装置１０で硝酸カリウム水溶液を透析処理して生成させたものである。【選択図】図１