MANUFACTURING METHOD OF FUNCTIONAL LAYER

To continuously manufacture functional layers with the substantially uniform thickness on a surface of a material to be treated after peeling a protective film from the material to be treated.SOLUTION: A manufacturing method of a functional layer comprises the steps of: conveying a long belt-like ra...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KONDO SEIJI, UCHIYAMA TOMONARI, KUBOTA DAIKI, MURAKAMI MASAHIRO, SAIJO YUKIO, YAMAMOTO SHINJI
Format: Patent
Sprache:eng ; jpn
Schlagworte:
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