ADHERING MATERIAL INSPECTION DEVICE

To provide an adhering material inspection device which can improve detection sensitivity of an adhering material.SOLUTION: An adhering material inspection device 1 comprises: a first wall part 10 and a second wall part 20 which are arranged so as to extend along a reference axis and oppose each other and form an inspection space of an inspection object therebetween; a collection part 11 which has a suction path 13 communicating to the inspection space; a jetting part 12 which continuously injects a layered jet including a gas of the inspection space obtained via the collection part 11 along an inlet surface of the inspection space which the inspection object enters toward the second wall part 20 from the first wall part 10; and an analysis part 32 which analyzes an adhering material of the inspection object or a specific material derived from the adhering material from the gas of the inspection space obtained via the collection part 11. The second wall part 20 includes a recess 21 which opposes the first wall part 10 and extends along the reference axis. The jetting part 12 has a nozzle 16 for generating the jet. The nozzle 16 is oriented to an edge 21a closer to the inlet surface out of a pair of edges 21a, 21a of the recess 20 along the reference axis.SELECTED DRAWING: Figure 1 【課題】付着物質の検出感度を向上させることが可能な付着物質検査装置を提供する。【解決手段】付着物質検査装置１は、基準軸に沿って延伸すると共に互いに対向配置され、その間に検査対象の検査空間を形成する第１壁部１０及び第２壁部２０と、検査空間に連通する吸入路１３を有する捕集部１１と、捕集部１１を介して得られた検査空間の気体を含み且つ検査対象が進入する検査空間の入口面に沿った層状のジェットを、第１壁部１０から第２壁部２０に向けて連続的に噴射する噴射部１２と、捕集部１１を介して得られた検査空間の気体から、検査対象の付着物質又は付着物質に由来する特定の物質を分析する分析部３２とを備える。第２壁部２０は、第１壁部１０に面すると共に基準軸に沿って延伸する凹部２１を含み、噴射部１２はジェットを発生するためのノズル１６を有し、ノズル１６は、基準軸に沿った凹部２０の一対の縁部２１ａ、２１ａのうち、入口面に近い縁部２１ａに向けられている。【選択図】図１