INFORMATION PROCESSING DEVICE, TRANSFER POSITION TEACHING METHOD AND SUBSTRATE PROCESSING DEVICE

To provide a technology with which it is possible to automatize teaching of a movement operation to a conveyance device that conveys the substrate to be processed.SOLUTION: There is provided, an information processing device for teaching a substrate transfer position to a conveyance device of a substrate processing device that conveys a substrate between a conveyance source object and a conveyance destination object on which a substrate can be mounted. The information processing device comprises: means for acquiring, from an imaging device, image data of mounting positions of the conveyance source and conveyance destination objects; means for quantifying a positional relation of the conveyance source object, the conveyance device and the substrate, on the basis of image data in which the movement operation of the conveyance device that acquires the substrate to be processed is filmed; means for quantifying a positional relation of the conveyance destination object, the conveyance device and the substrate, on the basis of image data in which the movement operation of the conveyance device that mounts a substrate is filmed; means for outputting correction data for the movement operation of the conveyance device that acquires a substrate from the conveyance source object on the basis of the quantified positional relation; and means for outputting correction data for the movement operation of the conveyance device that mounts a substrate on the conveyance destination device on the basis of the quatified positional relation.SELECTED DRAWING: Figure 4 【課題】被処理基板を搬送する搬送装置に対する移動動作の教示を自動化できる技術を提供する。【解決手段】基板を載置可能な搬送元対象物及び搬送先対象物の間で基板を搬送する基板処理装置の搬送装置に対して基板の移載位置を教示する情報処理装置であって、撮影装置から搬送元対象物及び搬送先対象物の載置位置の画像データを取得する手段と、被処理基板を取得する搬送装置の移動動作を撮影した画像データに基づき、搬送元対象物、搬送装置、及び基板の位置関係を数値化する手段と、基板を載置する搬送装置の移動動作を撮影した画像データに基づき、搬送先対象物、搬送装置、及び基板の位置関係を数値化する手段と、数値化された位置関係に基づいて、搬送元対象物から基板を取得する搬送装置の移動動作の補正データを出力する手段と、数値化された位置関係に基づいて、搬送先対象物に基板を載置する搬送装置の移動動作の補正データを出力する手段と、を有する。【選択図】図４