CUTTING DEVICE AND CUTTING METHOD

To provide a new technique for enabling a cutting blade to be accurately set up, by removing chips adhering onto an inspection piece.SOLUTION: A cutting device 2 comprises: a holding table 16 on which a work-piece is held; a cutting unit 26 having a spindle 48 to which a cutting blade 50 that cuts t...

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Hauptverfasser: KOMATSU ATSUSHI, MINATO KOKICHI
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creator KOMATSU ATSUSHI
MINATO KOKICHI
description To provide a new technique for enabling a cutting blade to be accurately set up, by removing chips adhering onto an inspection piece.SOLUTION: A cutting device 2 comprises: a holding table 16 on which a work-piece is held; a cutting unit 26 having a spindle 48 to which a cutting blade 50 that cuts the work-piece held on the holding table 16 is attached; an inspection-piece table 70 which holds an inspection piece 78 that forms a notched/cut trace 75 using the cutting blade 50; a photographing camera 29 that photographs the cut trace 75 formed in the inspection piece 78; and a cleaning liquid supply nozzle 74 that supplies cleaning liquid to the inspection piece 78 held on the inspection-piece table 70.SELECTED DRAWING: Figure 2 【課題】 検査片上に付着する切削屑を除去することで、切削ブレードのセットアップを正確に行うことを可能とするための新規な技術を提供する。【解決手段】被加工物を保持する保持テーブル16と、該保持テーブル16で保持された被加工物を切削する切削ブレード50が装着されるスピンドル48を有した切削ユニット26と、該切削ブレード50で切り込み切削痕75を形成する検査片78を保持する検査片用テーブル70と、該検査片78に形成された該切削痕75を撮像する撮像カメラ29と、を備えた切削装置2であって、該検査片用テーブル70で保持された検査片78に洗浄液を供給する洗浄液供給ノズル74を備えた切削装置とする。【選択図】図2
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language eng ; jpn
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subjects BASIC ELECTRIC ELEMENTS
DRESSING OR CONDITIONING OF ABRADING SURFACES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
GRINDING
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
PERFORMING OPERATIONS
POLISHING
SEMICONDUCTOR DEVICES
TRANSPORTING
title CUTTING DEVICE AND CUTTING METHOD
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