SUBSTRATE PROCESSING APPARATUS
To provide a piece of substrate processing apparatus that is able to effectively acquire images of a plurality of screens to be switched and displayed.SOLUTION: A pieces of substrate processing apparatus 1 includes: a holding unit 10 that holds a substrate; a processing unit 20 that performs process...
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| creator | NAKANISHI YUTA ONAYA TAKUTO HIYAMA MASAAKI |
| description | To provide a piece of substrate processing apparatus that is able to effectively acquire images of a plurality of screens to be switched and displayed.SOLUTION: A pieces of substrate processing apparatus 1 includes: a holding unit 10 that holds a substrate; a processing unit 20 that performs processing on the substrate held by the holding unit 10; a display unit 31 that displays information on the substrate processing apparatus 1; and a control unit 40. The control unit 40 has a screen information storage unit 411 that stores a plurality of screens switched and displayed on the display unit 31; a list storage unit 412 that stores a favorite list showing an arbitrary screen selected from the plurality of screens; and an image acquisition unit 422 that collectively acquires an image of the screen stored in the favorite list.SELECTED DRAWING: Figure 2
【課題】切り替えて表示する複数の画面の画像を効率的に取得できる基板処理装置を提供する。【解決手段】基板処理装置１は、基板を保持する保持ユニット１０と、該保持ユニット１０に保持された基板に処理を行う加工ユニット２０と、基板処理装置１に関する情報を表示する表示部３１と、制御ユニット４０と、を備える。制御ユニット４０は、表示部３１に切り替えて表示される複数の画面を記憶する画面情報記憶部４１１と、複数の画面の内、選択された任意の画面を示すお気に入りリストを記憶するリスト記憶部４１２と、お気に入りリストに記憶された画面の画像を一括で取得する画像取得部４２２と、を有する。【選択図】図２ |
| format | Patent |
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【課題】切り替えて表示する複数の画面の画像を効率的に取得できる基板処理装置を提供する。【解決手段】基板処理装置１は、基板を保持する保持ユニット１０と、該保持ユニット１０に保持された基板に処理を行う加工ユニット２０と、基板処理装置１に関する情報を表示する表示部３１と、制御ユニット４０と、を備える。制御ユニット４０は、表示部３１に切り替えて表示される複数の画面を記憶する画面情報記憶部４１１と、複数の画面の内、選択された任意の画面を示すお気に入りリストを記憶するリスト記憶部４１２と、お気に入りリストに記憶された画面の画像を一括で取得する画像取得部４２２と、を有する。【選択図】図２</description><language>eng ; jpn</language><subject>CONTROL OR REGULATING SYSTEMS IN GENERAL ; CONTROLLING ; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS ; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS ; PHYSICS ; REGULATING</subject><creationdate>2022</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20221027&DB=EPODOC&CC=JP&NR=2022164003A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76293</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20221027&DB=EPODOC&CC=JP&NR=2022164003A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>NAKANISHI YUTA</creatorcontrib><creatorcontrib>ONAYA TAKUTO</creatorcontrib><creatorcontrib>HIYAMA MASAAKI</creatorcontrib><title>SUBSTRATE PROCESSING APPARATUS</title><description>To provide a piece of substrate processing apparatus that is able to effectively acquire images of a plurality of screens to be switched and displayed.SOLUTION: A pieces of substrate processing apparatus 1 includes: a holding unit 10 that holds a substrate; a processing unit 20 that performs processing on the substrate held by the holding unit 10; a display unit 31 that displays information on the substrate processing apparatus 1; and a control unit 40. The control unit 40 has a screen information storage unit 411 that stores a plurality of screens switched and displayed on the display unit 31; a list storage unit 412 that stores a favorite list showing an arbitrary screen selected from the plurality of screens; and an image acquisition unit 422 that collectively acquires an image of the screen stored in the favorite list.SELECTED DRAWING: Figure 2
【課題】切り替えて表示する複数の画面の画像を効率的に取得できる基板処理装置を提供する。【解決手段】基板処理装置１は、基板を保持する保持ユニット１０と、該保持ユニット１０に保持された基板に処理を行う加工ユニット２０と、基板処理装置１に関する情報を表示する表示部３１と、制御ユニット４０と、を備える。制御ユニット４０は、表示部３１に切り替えて表示される複数の画面を記憶する画面情報記憶部４１１と、複数の画面の内、選択された任意の画面を示すお気に入りリストを記憶するリスト記憶部４１２と、お気に入りリストに記憶された画面の画像を一括で取得する画像取得部４２２と、を有する。【選択図】図２</description><subject>CONTROL OR REGULATING SYSTEMS IN GENERAL</subject><subject>CONTROLLING</subject><subject>FUNCTIONAL ELEMENTS OF SUCH SYSTEMS</subject><subject>MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS</subject><subject>PHYSICS</subject><subject>REGULATING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2022</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZJALDnUKDglyDHFVCAjyd3YNDvb0c1dwDAhwBIqFBvMwsKYl5hSn8kJpbgYlN9cQZw_d1IL8-NTigsTk1LzUknivACMDIyNDMxMDA2NHY6IUAQAYDCIM</recordid><startdate>20221027</startdate><enddate>20221027</enddate><creator>NAKANISHI YUTA</creator><creator>ONAYA TAKUTO</creator><creator>HIYAMA MASAAKI</creator><scope>EVB</scope></search><sort><creationdate>20221027</creationdate><title>SUBSTRATE PROCESSING APPARATUS</title><author>NAKANISHI YUTA ; ONAYA TAKUTO ; HIYAMA MASAAKI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2022164003A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; jpn</language><creationdate>2022</creationdate><topic>CONTROL OR REGULATING SYSTEMS IN GENERAL</topic><topic>CONTROLLING</topic><topic>FUNCTIONAL ELEMENTS OF SUCH SYSTEMS</topic><topic>MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS</topic><topic>PHYSICS</topic><topic>REGULATING</topic><toplevel>online_resources</toplevel><creatorcontrib>NAKANISHI YUTA</creatorcontrib><creatorcontrib>ONAYA TAKUTO</creatorcontrib><creatorcontrib>HIYAMA MASAAKI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>NAKANISHI YUTA</au><au>ONAYA TAKUTO</au><au>HIYAMA MASAAKI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>SUBSTRATE PROCESSING APPARATUS</title><date>2022-10-27</date><risdate>2022</risdate><abstract>To provide a piece of substrate processing apparatus that is able to effectively acquire images of a plurality of screens to be switched and displayed.SOLUTION: A pieces of substrate processing apparatus 1 includes: a holding unit 10 that holds a substrate; a processing unit 20 that performs processing on the substrate held by the holding unit 10; a display unit 31 that displays information on the substrate processing apparatus 1; and a control unit 40. The control unit 40 has a screen information storage unit 411 that stores a plurality of screens switched and displayed on the display unit 31; a list storage unit 412 that stores a favorite list showing an arbitrary screen selected from the plurality of screens; and an image acquisition unit 422 that collectively acquires an image of the screen stored in the favorite list.SELECTED DRAWING: Figure 2
【課題】切り替えて表示する複数の画面の画像を効率的に取得できる基板処理装置を提供する。【解決手段】基板処理装置１は、基板を保持する保持ユニット１０と、該保持ユニット１０に保持された基板に処理を行う加工ユニット２０と、基板処理装置１に関する情報を表示する表示部３１と、制御ユニット４０と、を備える。制御ユニット４０は、表示部３１に切り替えて表示される複数の画面を記憶する画面情報記憶部４１１と、複数の画面の内、選択された任意の画面を示すお気に入りリストを記憶するリスト記憶部４１２と、お気に入りリストに記憶された画面の画像を一括で取得する画像取得部４２２と、を有する。【選択図】図２</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING |
| title | SUBSTRATE PROCESSING APPARATUS |
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