PLASMA PROCESSING SYSTEM AND PLASMA PROCESSING METHOD

To continue plasma processing even if components are deteriorated.SOLUTION: A plasma processing system 10 to be disclosed comprises: a plasma processing apparatus 100 that has a processing chamber 100a in which plasma processing on an object 400 is performed, and one or more components 122, 131 that are at least partially arranged inside the processing chamber 100a; a storage unit 301 that stores a recipe including a set value for defining a plasma processing condition; an allowable range determination unit 302 that determines the allowable range of the set value based on the degree of deterioration of the one or more components 122, 131; and a recipe changing unit 303 that, when the set value is out of the allowable range, changes the recipe so that the set value falls within the allowable range.SELECTED DRAWING: Figure 2 【課題】部品が劣化してもプラズマ処理を継続できるようにする。【解決手段】開示されるプラズマ処理システム１０は、対象物４００のプラズマ処理が行われる処理室１００ａ、および処理室１００ａ内に少なくとも一部が配置される少なくとも１つの部品１２２，１３１を有するプラズマ処理装置１００と、プラズマ処理条件を規定する設定値を含むレシピを記憶する記憶部３０１と、少なくとも１つの部品１２２，１３１の劣化度に基づいて設定値の許容範囲を決定する許容範囲決定部３０２と、設定値が許容範囲を外れている場合、設定値が許容範囲に収まるようにレシピを変更するレシピ変更部３０３と、を備える。【選択図】図２