MICROMIRROR DEVICE AND OPTICAL SCANNER

To provide a micromirror device that is small-sized and can increase the deflection angle of a mirror part in gas, and provide an optical scanner.SOLUTION: A micromirror device comprises: a movable part that has a mirror part provided with a reflection surface reflecting incident light; a first supp...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OKADA KO, AOSHIMA KEISUKE
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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