FLUID SENSOR FOR SENSING FLUID PROPERTIES COMPRISING TUNING FORK MECHANICAL RESONATOR
To provide further improvement on fluid sensors known in the art to enhance their life and reliability, in particular in extended temperature ranges and/or harsh environments.SOLUTION: A tuning fork mechanical resonator 3 comprises a base 11 and at least one tine 15A, 15B projecting from the base, w...
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| Format: | Patent |
| Sprache: | eng ; jpn |
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| Zusammenfassung: | To provide further improvement on fluid sensors known in the art to enhance their life and reliability, in particular in extended temperature ranges and/or harsh environments.SOLUTION: A tuning fork mechanical resonator 3 comprises a base 11 and at least one tine 15A, 15B projecting from the base, where the base and the at least one tine are made of a piezoelectric material. The at least one tine comprises at least two electrodes 17A, 17B; 19A, 19B configured to be exposed to a fluid. The piezoelectric material contains lithium tantalate.SELECTED DRAWING: Figure 1a
【課題】特に広い温度範囲および／または厳しい環境において、その寿命と信頼性を向上させるために、当技術分野で既知の流体センサをさらに改良する必要がある。【解決手段】音叉型機械共振器３は、ベース１１と、ベースから突出する少なくとも１つのタイン１５Ａ、１５Ｂとを含み、ベースと少なくとも１つのタインとは圧電材料で形成され、少なくとも１つのタインは、流体に晒されるように構成されている少なくとも２つの電極１７Ａ、１７Ｂ；１９Ａ、１９Ｂを含む。圧電材料はタンタル酸リチウムを含む。【選択図】図１ａ |
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