LED CHUCK

To provide a technology for suppressing external radiation of noise generated when an LED is applied.SOLUTION: An LED chuck includes a top plate on which an object to be inspected is placed, an LED array substrate provided with a plurality of LEDs arranged so as to face the object to be inspected an...

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Bibliographische Detailangaben
Hauptverfasser:	NAKAYAMA HIROYUKI, NUKANOBU TOMOKI, MORIFUJI YOSHIYUKI, KASAI SHIGERU, KOBAYASHI MASARU
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	To provide a technology for suppressing external radiation of noise generated when an LED is applied.SOLUTION: An LED chuck includes a top plate on which an object to be inspected is placed, an LED array substrate provided with a plurality of LEDs arranged so as to face the object to be inspected and heating the object to be inspected placed on the top plate, a cooling plate arranged on the back side of the LED array substrate, an LED control board arranged on the back side of the cooling plate and controlling the plurality of LEDs, and a base plate arranged so as to surround the LED control board, and a surface of the cooling plate facing the LED control board and a surface of the base plate facing the LED control board are made of a magnetic material.SELECTED DRAWING: Figure 3 【課題】ＬＥＤを照射する際に発生するノイズの外部への放射を抑制する技術を提供する。【解決手段】被検査体が載置されるトッププレートと、前記被検査体に対向して配置され、前記トッププレートに載置される被検査体を加熱する複数のＬＥＤが設けられたＬＥＤアレイ基板と、前記ＬＥＤアレイ基板の裏面側に配置されるクーリングプレートと、前記クーリングプレートの裏面側に配置されて前記複数のＬＥＤを制御するＬＥＤ制御基板と、前記ＬＥＤ制御基板を囲むように配置されるベースプレートと、を備え、前記クーリングプレートの前記ＬＥＤ制御基板に対向する面及び前記ベースプレートの前記ＬＥＤ制御基板に対向する面は、磁性体材料からなるＬＥＤチャック。【選択図】図３