HOLDING TABLE

To provide a holding table which can suppress adhesion of a working liquid to a lens of an imaging camera.SOLUTION: A holding table 1 comprises: a transparent plate 2 including a holding surface 21; an annular support member 3 including an annular support surface 31 which supports the transparent pl...

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Hauptverfasser: NAKAMA JUN, UENO KOHEI
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UENO KOHEI
description To provide a holding table which can suppress adhesion of a working liquid to a lens of an imaging camera.SOLUTION: A holding table 1 comprises: a transparent plate 2 including a holding surface 21; an annular support member 3 including an annular support surface 31 which supports the transparent plate 2; and a presser member 4 sandwiching an outer marginal part of the transparent plate 2 together with the annular support member 3. A suction groove 23 opened to the holding surface 21, a back face side opening 25 of a back face 24 of the holding surface 21, and a transparent plate flow channel 26 from the suction groove 23 to the back face side opening 25 are formed in the transparent plate 2, and an annular groove 61, which is connected to the back face side opening 25 of the transparent plate 2 and opened to the annular support surface 31, and is switchably connected to an ejector 64 and an air supply source 62 via valves 66, 68, 69, is formed in the annular support member 3. A pair of annular suction grooves 7, which are opened to the annular support surface 31 and are connected to the ejector 64, are formed on both sides of the annular groove 61 in the annular support surface 31.SELECTED DRAWING: Figure 5 【課題】撮像カメラのレンズに加工液が付着することを抑制することができる保持テーブルを提供すること。【解決手段】保持テーブル1は、保持面21を含む透明板2と、透明板2を支持する環状支持面31を含む環状支持部材3と、透明板2の外縁部を環状支持部材3とともに挟持する押さえ部材4とを備え、透明板2には保持面21に開口した吸引溝23と保持面21の背面24の背面側開口25と吸引溝23から背面側開口25に至る透明板流路26が形成され、環状支持部材3には透明板2の背面側開口25に接続し環状支持面31に開口するとともにエジェクタ64とエアー供給源62とに切り替え自在にバルブ66,68,69を介して接続される環状溝61が形成され、環状支持面31には環状溝61の両側に環状支持面31に開口しエジェクタ64に接続される一対の環状吸引溝7が形成される。【選択図】図5
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fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_JP2022151351A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>JP2022151351A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_JP2022151351A3</originalsourceid><addsrcrecordid>eNrjZOD18Pdx8fRzVwhxdPJx5WFgTUvMKU7lhdLcDEpuriHOHrqpBfnxqcUFicmpeakl8V4BRgZGRoamhsamho7GRCkCANR8HOE</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>HOLDING TABLE</title><source>esp@cenet</source><creator>NAKAMA JUN ; UENO KOHEI</creator><creatorcontrib>NAKAMA JUN ; UENO KOHEI</creatorcontrib><description>To provide a holding table which can suppress adhesion of a working liquid to a lens of an imaging camera.SOLUTION: A holding table 1 comprises: a transparent plate 2 including a holding surface 21; an annular support member 3 including an annular support surface 31 which supports the transparent plate 2; and a presser member 4 sandwiching an outer marginal part of the transparent plate 2 together with the annular support member 3. A suction groove 23 opened to the holding surface 21, a back face side opening 25 of a back face 24 of the holding surface 21, and a transparent plate flow channel 26 from the suction groove 23 to the back face side opening 25 are formed in the transparent plate 2, and an annular groove 61, which is connected to the back face side opening 25 of the transparent plate 2 and opened to the annular support surface 31, and is switchably connected to an ejector 64 and an air supply source 62 via valves 66, 68, 69, is formed in the annular support member 3. A pair of annular suction grooves 7, which are opened to the annular support surface 31 and are connected to the ejector 64, are formed on both sides of the annular groove 61 in the annular support surface 31.SELECTED DRAWING: Figure 5 【課題】撮像カメラのレンズに加工液が付着することを抑制することができる保持テーブルを提供すること。【解決手段】保持テーブル1は、保持面21を含む透明板2と、透明板2を支持する環状支持面31を含む環状支持部材3と、透明板2の外縁部を環状支持部材3とともに挟持する押さえ部材4とを備え、透明板2には保持面21に開口した吸引溝23と保持面21の背面24の背面側開口25と吸引溝23から背面側開口25に至る透明板流路26が形成され、環状支持部材3には透明板2の背面側開口25に接続し環状支持面31に開口するとともにエジェクタ64とエアー供給源62とに切り替え自在にバルブ66,68,69を介して接続される環状溝61が形成され、環状支持面31には環状溝61の両側に環状支持面31に開口しエジェクタ64に接続される一対の環状吸引溝7が形成される。【選択図】図5</description><language>eng ; jpn</language><subject>BASIC ELECTRIC ELEMENTS ; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT ; DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ; DRESSING OR CONDITIONING OF ABRADING SURFACES ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS ; GRINDING ; MACHINE TOOLS ; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS ; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING ; METAL-WORKING NOT OTHERWISE PROVIDED FOR ; PERFORMING OPERATIONS ; POLISHING ; SEMICONDUCTOR DEVICES ; TRANSPORTING</subject><creationdate>2022</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20221007&amp;DB=EPODOC&amp;CC=JP&amp;NR=2022151351A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25562,76317</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20221007&amp;DB=EPODOC&amp;CC=JP&amp;NR=2022151351A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>NAKAMA JUN</creatorcontrib><creatorcontrib>UENO KOHEI</creatorcontrib><title>HOLDING TABLE</title><description>To provide a holding table which can suppress adhesion of a working liquid to a lens of an imaging camera.SOLUTION: A holding table 1 comprises: a transparent plate 2 including a holding surface 21; an annular support member 3 including an annular support surface 31 which supports the transparent plate 2; and a presser member 4 sandwiching an outer marginal part of the transparent plate 2 together with the annular support member 3. A suction groove 23 opened to the holding surface 21, a back face side opening 25 of a back face 24 of the holding surface 21, and a transparent plate flow channel 26 from the suction groove 23 to the back face side opening 25 are formed in the transparent plate 2, and an annular groove 61, which is connected to the back face side opening 25 of the transparent plate 2 and opened to the annular support surface 31, and is switchably connected to an ejector 64 and an air supply source 62 via valves 66, 68, 69, is formed in the annular support member 3. A pair of annular suction grooves 7, which are opened to the annular support surface 31 and are connected to the ejector 64, are formed on both sides of the annular groove 61 in the annular support surface 31.SELECTED DRAWING: Figure 5 【課題】撮像カメラのレンズに加工液が付着することを抑制することができる保持テーブルを提供すること。【解決手段】保持テーブル1は、保持面21を含む透明板2と、透明板2を支持する環状支持面31を含む環状支持部材3と、透明板2の外縁部を環状支持部材3とともに挟持する押さえ部材4とを備え、透明板2には保持面21に開口した吸引溝23と保持面21の背面24の背面側開口25と吸引溝23から背面側開口25に至る透明板流路26が形成され、環状支持部材3には透明板2の背面側開口25に接続し環状支持面31に開口するとともにエジェクタ64とエアー供給源62とに切り替え自在にバルブ66,68,69を介して接続される環状溝61が形成され、環状支持面31には環状溝61の両側に環状支持面31に開口しエジェクタ64に接続される一対の環状吸引溝7が形成される。【選択図】図5</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT</subject><subject>DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING</subject><subject>DRESSING OR CONDITIONING OF ABRADING SURFACES</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS</subject><subject>GRINDING</subject><subject>MACHINE TOOLS</subject><subject>MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS</subject><subject>MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING</subject><subject>METAL-WORKING NOT OTHERWISE PROVIDED FOR</subject><subject>PERFORMING OPERATIONS</subject><subject>POLISHING</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2022</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZOD18Pdx8fRzVwhxdPJx5WFgTUvMKU7lhdLcDEpuriHOHrqpBfnxqcUFicmpeakl8V4BRgZGRoamhsamho7GRCkCANR8HOE</recordid><startdate>20221007</startdate><enddate>20221007</enddate><creator>NAKAMA JUN</creator><creator>UENO KOHEI</creator><scope>EVB</scope></search><sort><creationdate>20221007</creationdate><title>HOLDING TABLE</title><author>NAKAMA JUN ; UENO KOHEI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2022151351A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; jpn</language><creationdate>2022</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT</topic><topic>DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING</topic><topic>DRESSING OR CONDITIONING OF ABRADING SURFACES</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS</topic><topic>GRINDING</topic><topic>MACHINE TOOLS</topic><topic>MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS</topic><topic>MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING</topic><topic>METAL-WORKING NOT OTHERWISE PROVIDED FOR</topic><topic>PERFORMING OPERATIONS</topic><topic>POLISHING</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>NAKAMA JUN</creatorcontrib><creatorcontrib>UENO KOHEI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>NAKAMA JUN</au><au>UENO KOHEI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>HOLDING TABLE</title><date>2022-10-07</date><risdate>2022</risdate><abstract>To provide a holding table which can suppress adhesion of a working liquid to a lens of an imaging camera.SOLUTION: A holding table 1 comprises: a transparent plate 2 including a holding surface 21; an annular support member 3 including an annular support surface 31 which supports the transparent plate 2; and a presser member 4 sandwiching an outer marginal part of the transparent plate 2 together with the annular support member 3. A suction groove 23 opened to the holding surface 21, a back face side opening 25 of a back face 24 of the holding surface 21, and a transparent plate flow channel 26 from the suction groove 23 to the back face side opening 25 are formed in the transparent plate 2, and an annular groove 61, which is connected to the back face side opening 25 of the transparent plate 2 and opened to the annular support surface 31, and is switchably connected to an ejector 64 and an air supply source 62 via valves 66, 68, 69, is formed in the annular support member 3. A pair of annular suction grooves 7, which are opened to the annular support surface 31 and are connected to the ejector 64, are formed on both sides of the annular groove 61 in the annular support surface 31.SELECTED DRAWING: Figure 5 【課題】撮像カメラのレンズに加工液が付着することを抑制することができる保持テーブルを提供すること。【解決手段】保持テーブル1は、保持面21を含む透明板2と、透明板2を支持する環状支持面31を含む環状支持部材3と、透明板2の外縁部を環状支持部材3とともに挟持する押さえ部材4とを備え、透明板2には保持面21に開口した吸引溝23と保持面21の背面24の背面側開口25と吸引溝23から背面側開口25に至る透明板流路26が形成され、環状支持部材3には透明板2の背面側開口25に接続し環状支持面31に開口するとともにエジェクタ64とエアー供給源62とに切り替え自在にバルブ66,68,69を介して接続される環状溝61が形成され、環状支持面31には環状溝61の両側に環状支持面31に開口しエジェクタ64に接続される一対の環状吸引溝7が形成される。【選択図】図5</abstract><oa>free_for_read</oa></addata></record>
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language eng ; jpn
recordid cdi_epo_espacenet_JP2022151351A
source esp@cenet
subjects BASIC ELECTRIC ELEMENTS
COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT
DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING
DRESSING OR CONDITIONING OF ABRADING SURFACES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
GRINDING
MACHINE TOOLS
MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
METAL-WORKING NOT OTHERWISE PROVIDED FOR
PERFORMING OPERATIONS
POLISHING
SEMICONDUCTOR DEVICES
TRANSPORTING
title HOLDING TABLE
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