SEMICONDUCTOR STORAGE DEVICE
To provide a semiconductor storage device in which the bending or inclination of a layer can be reduced.SOLUTION: A semiconductor storage device 1 according to an embodiment includes a first laminate SK1 in which a plurality of conductive layers WL and a plurality of insulating layers OL are stacked...
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Zusammenfassung: | To provide a semiconductor storage device in which the bending or inclination of a layer can be reduced.SOLUTION: A semiconductor storage device 1 according to an embodiment includes a first laminate SK1 in which a plurality of conductive layers WL and a plurality of insulating layers OL are stacked alternately, the first laminate SK1 including a step part SR processed in a step-like shape extending in a first direction so that the conductive layers WL form a terrace surface, an insulating film IL1 covering an upper part of the first laminate SK1 including the step part SR, and a first plate-shaped part ST extending in the first direction on at least one side surface side of the step part SR and penetrating the first laminate SK1, the first plate-shaped part ST including a bridge part BR disposed intermittently in the first direction at least on an upper end part and connecting the insulating film IL1 on both sides of the first plate-shaped part ST.SELECTED DRAWING: Figure 3
【課題】層の撓みや傾斜を低減できる半導体記憶装置を提供する。【解決手段】実施形態による半導体記憶装置1は、複数の導電層WLと複数の絶縁層OLとが交互に一層ずつ積層され、前記複数の導電層WLがテラス面を形成するように第1の方向に延びる階段状に加工された階段部SRを含む第1の積層体SK1と、前記階段部SRを含む前記第1の積層体SK1の上方を覆う絶縁膜IL1と、前記階段部SRの少なくとも一つの側面側に前記第1の方向に沿って延び、前記第1の積層体SK1を貫通する第1の板状部STであって、少なくとも上端部に前記第1の方向に間欠的に配置され、前記絶縁膜IL1を前記第1の板状部STの両側で接続する架橋部BPを含む当該第1の板状部STとを備える。【選択図】図3 |
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