TREATMENT LIQUID SUPPLY DEVICE AND SOLID REMOVAL METHOD FOR TREATMENT LIQUID SUPPLY DEVICE

To provide a treatment liquid supply device, and a solid removal method for the treatment liquid supply device.SOLUTION: A treatment liquid supply device according to the present invention supplies a treatment liquid to a substrate processing device and recovers and regenerates the treatment liquid,...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	LEE MU HYEON
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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