COLOR GRATING IN MICROELECTRONIC STRUCTURE

To provide a microelectronic structure and a computing device that remedy the shortcomings of a traditional extreme ultraviolet (EUV) lithography technique by using a manufacturing technique that include a guided self-organization (DSA) operation.SOLUTION: A microelectronic structure 100 includes a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MANISH CHANDHOK, FLORIAN GSTREIN, PAUL A NYHUS, GURPREET SINGH, RICHARD E SCHENKER, HAN EUNGNAK, CHARLES HENRY WALLACE
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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