COLOR GRATING IN MICROELECTRONIC STRUCTURE

To provide a microelectronic structure and a computing device that remedy the shortcomings of a traditional extreme ultraviolet (EUV) lithography technique by using a manufacturing technique that include a guided self-organization (DSA) operation.SOLUTION: A microelectronic structure 100 includes a...

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Hauptverfasser: MANISH CHANDHOK, FLORIAN GSTREIN, PAUL A NYHUS, GURPREET SINGH, RICHARD E SCHENKER, HAN EUNGNAK, CHARLES HENRY WALLACE
Format: Patent
Sprache:eng ; jpn
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Zusammenfassung:To provide a microelectronic structure and a computing device that remedy the shortcomings of a traditional extreme ultraviolet (EUV) lithography technique by using a manufacturing technique that include a guided self-organization (DSA) operation.SOLUTION: A microelectronic structure 100 includes a first conductive structure 121 that is alternately provided with a second conductive structure 120. Each first conductive structure includes a bottom 121A and a top 121B. Cap structures 149 are respectively on tops of the second conductive structures. The bottom of the first conductive structure is laterally separated from the second conductive structure to align with the second conductive structure, and the top of the first conductive structure is laterally separated from the cap structure, and aligned with the cap structure. The microelectronic structure includes one or more disordered layered regions 143 that are laterally separated from the first conductive structure and are aligned with the first conductive structure.SELECTED DRAWING: Figure 1A 【課題】誘導自己組織化(DSA)オペレーションを含む製造技術を用いることにより、従来の極端紫外線(EUV)リソグラフィ技術の欠点を直すマイクロ電子構造体及びコンピューティングデバイスを提供する。【解決手段】マイクロ電子構造体100は、第2の導電性構造体120と交互に設けられた第1の導電性構造体121を含む。第1の導電性構造体の個々は、底部121A及び上部121Bを含む。個々のキャップ構造体149は、第2の導電性構造体の個々の上にある。第1の導電性構造体の底部は、第2の導電性構造体から横方向に離間され、第2の導電性構造体と整合し、第1の導電性構造体の上部は、キャップ構造体から横方向に離間され、キャップ構造体と整合している。マイクロ電子構造体は、第1の導電性構造体から横方向に離間され、第1の導電性構造体と整合する1つまたは複数の無秩序層状領域143を含む。【選択図】図1A