METHOD AND DEVICE FOR DETECTING LIQUID LAYER THICKNESS
To provide a method and device for non-contactly detecting the thickness of a liquid layer covering a substrate such as spring water on a pit face.SOLUTION: The present invention irradiates a plurality of lights R, B having different wavelengths λr, λb from the surface of a liquid layer (for example...
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Format: | Patent |
Sprache: | eng ; jpn |
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