BUTTERFLY TYPE PRESSURE CONTROL VALVE

To provide a butterfly type pressure control valve which is disposed at an exhaust side of a vacuum chamber of a vacuum treatment device, heats a flapper and a periphery of the flapper with a heater to prevent adhesion of products, enables a high speed opening/closing operation while achieving reduc...

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Bibliographische Detailangaben
1. Verfasser: IWABUCHI TOSHIAKI
Format: Patent
Sprache:eng ; jpn
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