TEST EQUIPMENT

To provide a test equipment that can reliably direct a clean air flow around a substrate to below the substrate in the test equipment that supplies clean air to a test chamber.SOLUTION: In a test chamber 100, a rectifying plate 140 covers a part of a top surface of a stage 120 on which a substrate 2...

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Bibliographische Detailangaben
Hauptverfasser:	SHIBAYAMA KEI, MATSUNO HITOSHI, SATO YOSHIHIRO, YOSHIMURA OSAMU, IIJIMA YUICHIRO, MASUDA TOSHIO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	To provide a test equipment that can reliably direct a clean air flow around a substrate to below the substrate in the test equipment that supplies clean air to a test chamber.SOLUTION: In a test chamber 100, a rectifying plate 140 covers a part of a top surface of a stage 120 on which a substrate 20 is placed and is positioned between a gas supply 110 and the stage to block airflow toward the substrate.SELECTED DRAWING: Figure 2 【課題】清浄な空気を検査室に対して供給する検査装置において、基板周辺の清浄な空気流を基板の下方へ確実に向かわせることが可能な検査装置を提供する。【解決手段】検査室１００において、基板２０を載置するステージ１２０の上面の一部を覆うとともに、気体供給部１１０とステージとの間に配置され基板へ向かう気流を遮断する、整流板１４０を備える。【選択図】図２