TRAP DEVICE AND SEMICONDUCTOR MANUFACTURING DEVICE

To increase the efficiency in collecting a by-product in exhaust gas.SOLUTION: There is provided a trap device that has: an exhaust gas introduction pipe that causes exhaust gas to flow and delivers the gas from a delivery port; a fin member that faces the delivery port and is arranged at a position where the exhaust gas delivered from the delivery port hits; an exhaust path forming member that covers the exhaust gas introduction pipe, and has exhaust paths that exhaust the exhaust gas while being folded in a direction opposite to the direction of the exhaust gas flowing in the exhaust gas introduction pipe via the fin member; and a cooling jacket that cools the fin member. The fin member has a fin part that extends in a direction opposite to the direction of the exhaust gas flowing in the exhaust gas introduction pipe.SELECTED DRAWING: Figure 2 【課題】排気ガス中の副生成物の捕集効率を高める。【解決手段】排気ガスを流し、導出口から導出する排気ガス導入管と、前記導出口に対向し、前記導出口から導出された排気ガスが当たる位置に配置されるフィン部材と、前記排気ガス導入管を覆い、前記フィン部材を介して前記排気ガス導入管を流れる排気ガスの方向に対して逆方向に折り返しながら前記排気ガスを排気する排気路を有する排気路形成部材と、前記フィン部材を冷却する冷却ジャケットと、を有し、前記フィン部材は、前記排気ガス導入管を流れる排気ガスの方向に対して逆方向へ延出するフィン部を有する、トラップ装置が提供される。【選択図】図２