MEASUREMENT DEVICE AND MEASUREMENT METHOD

To provide a measurement device and a measurement method that can perform accurate measurement with a simplified structure.SOLUTION: An aspect of the present invention is a measurement device including a detection unit including a pair of detection electrodes, a signal generation unit that generates a detection AC signal with a predetermined frequency and varies the frequency of the detection AC signal in a predetermined range, a phase shift unit that includes an LC circuit including a coil and a capacitor, is connected to the pair of detection electrodes, and shifts the phase of the detection AC signal in accordance with the frequency, a phase comparison unit that obtains the phase difference between the detection AC signal and the signal with the phase shifted by the phase shift unit, and a calculation unit that determines the frequency of the detection AC signal where the phase difference obtained by the phase comparison unit is 90° to be a reference frequency, obtains a resistance component between the pair of detection electrodes in accordance with the change quantity of the phase difference obtained by the phase comparison unit when the frequency of the detection AC signal is changed in a predetermined range with the reference frequency as a center, and obtains a capacity component between the pair of detection electrodes in accordance with the reference frequency.SELECTED DRAWING: Figure 1 【課題】構成の簡素化とともに正確な測定を行うことができる測定装置および測定方法を提供すること。【解決手段】本発明の一態様は、一対の検知電極を有する検知部と、所定周波数の検知用交流信号を発生し、検知用交流信号の周波数を所定範囲で可変する信号発生部と、コイルおよびコンデンサによるＬＣ回路を有し、一対の検知電極と接続され、周波数に応じて検知用交流信号の位相をシフトさせる位相シフト部と、検知用交流信号と、位相シフト部で位相シフトした信号との位相差を求める位相比較部と、位相比較部で求めた位相差が９０°となる検知用交流信号の周波数を基準周波数として、基準周波数を中心とした所定範囲で検知用交流信号の周波数を変化させた際の位相比較部で求めた位相差の変化量に応じて一対の検知電極間の抵抗成分を求めたり、基準周波数に応じて一対の検知電極間の容量成分を求めたりする計算部と、を備えた測定装置である。【選択図】図１