MANUFACTURING METHOD OF SOLDER CHIP, SOLDER CHIP AND JUNCTION LAYER EVALUATION DEVICE USING THE SAME
To evaluate the deterioration and lifetime of a junction layer by quantitatively evaluating the junction layer.SOLUTION: On a SiC substrate 106, a thin film heater 117 consisting of Ni-P is formed between a terminal electrode 115a and a terminal electrode 115b, and a temperature probe 116 consisting...
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Sprache: | eng ; jpn |
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