LIGHT SOURCE, SPECTRAL ANALYSIS SYSTEM, AND SPECTRAL ANALYSIS METHOD

To provide a light source which has a long life and is used for a wide range of film thickness measurements, a spectral analysis system, and a spectral analysis method.SOLUTION: The light source includes a light-emitting diode, a wavelength conversion part which is configured so as to convert the wa...

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Bibliographische Detailangaben
1. Verfasser:	UMEHARA YASUTOSHI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING COLORIMETRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMSTHEREOF HEATING INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES LIGHTING MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING MECHANICAL ENGINEERING PHYSICS RADIATION PYROMETRY SEMICONDUCTOR DEVICES STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHERARTICLES, NOT OTHERWISE PROVIDED FOR TESTING WEAPONS
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Beschreibung
Zusammenfassung:	To provide a light source which has a long life and is used for a wide range of film thickness measurements, a spectral analysis system, and a spectral analysis method.SOLUTION: The light source includes a light-emitting diode, a wavelength conversion part which is configured so as to convert the wavelength of light outputted from the light-emitting diode, and a condensing part which is configured so as to condense the light outputted from the wavelength conversion part.SELECTED DRAWING: Figure 3 【課題】長寿命で広範囲の膜厚測定に用いることができる光源、分光分析システム及び分光分析方法を提供する。【解決手段】光源は、発光ダイオードと、前記発光ダイオードから出力された光の波長を変換するように構成される波長変換部と、前記波長変換部から出力された光を集光するように構成される集光部と、を有する。【選択図】図３