VACUUM VALVE
To provide a vacuum valve that reliably prevents damage to bellows due to arcs.SOLUTION: In a vacuum valve with a bellows cover 12, the bellows cover 12 includes a tubular portion 12a whose one end is joined to a movable side flange 4 and covers the side portion of the bellows 11, and a bottom porti...
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Format: | Patent |
Sprache: | eng ; jpn |
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