VACUUM VALVE

To provide a vacuum valve that reliably prevents damage to bellows due to arcs.SOLUTION: In a vacuum valve with a bellows cover 12, the bellows cover 12 includes a tubular portion 12a whose one end is joined to a movable side flange 4 and covers the side portion of the bellows 11, and a bottom porti...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: HIROSE SADAHISA
Format: Patent
Sprache:eng ; jpn
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!